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Curvy ILT

The source code of

Yang, Haoyu and Ren, Haoxing.
"GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation."
Proceedings of the 2025 International Symposium on Physical Design, pp. 42–50, 2025.

Update

08/25/2025: We enabled batch optimization, in run_iccad13_batch.py, 10 ILT runs in parallel and finish in 4s on RTX 6000 ADA. Morph is disabled in forward_test because it cost lots of memory.

Prepare

Install Package Dependencies

pip install -r requirements.txt

Install OpenCV seperately

$sudo apt-get install python3-opencv

Usage

This is a running example on ICCAD13 benchmark images. Change the directory for your own design.

python3 run_iccad13.py

We did not include the EPE computing code in this repo, please use neuralILT or other 3rd party tools.

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Haoyu Yang

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