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Silizium-Einfachbalken, GMS-Kraftsensor, Balkenresonator

tfconsult.com/tag/cfd/

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Name		Name	Last commit message	Last commit date
Latest commit History 91 Commits
ANSYS		ANSYS
BOSCH		BOSCH
Diplom		Diplom
FIDAP		FIDAP
Figures		Figures
paper		paper
README.md		README.md

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Flow

Silizium-Einfachbalken

Silizium Balkenresonator (silicon beam resonator)
elektro-thermmische Anregung und Detektion
metal thin-film (DMS)

GMS-Kraftsensor

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Silizium-Einfachbalken, GMS-Kraftsensor, Balkenresonator

tfconsult.com/tag/cfd/

simulation sensor fem finite-elements cfd silicon mems finite-element-methods ansys ansys-cfd ansys-model fidap

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