SF6O2 model parameters refactor (#73)

* Add SF6O2 parameter struct * Remove model parameters * SF6O2 parameters Python wrapper * Update SF6O2 example
ViennaTools · Mar 21, 2024 · 5c09768 · 5c09768
1 parent 32aabd1
commit 5c09768
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Showing 6 changed files with 324 additions and 225 deletions.
diff --git a/examples/holeEtching/config.txt b/examples/holeEtching/config.txt
@@ -2,7 +2,7 @@
 
 # all length units are in micrometers (um)
 # Domain
-gridDelta=5.0 # um
+gridDelta=4.0 # um
 xExtent=100.0 # um
 yExtent=100.0 # um
 

diff --git a/examples/holeEtching/holeEtching.cpp b/examples/holeEtching/holeEtching.cpp
@@ -12,6 +12,7 @@ int main(int argc, char *argv[]) {
   constexpr int D = 3;
 
   psLogger::setLogLevel(psLogLevel::INTERMEDIATE);
+  omp_set_num_threads(16);
 
   // Parse the parameters
   Parameters<NumericType> params;

diff --git a/examples/holeEtching/holeEtching.py b/examples/holeEtching/holeEtching.py
@@ -43,6 +43,8 @@
     oxySputterYield=params["A_O"],
     etchStopDepth=params["etchStopDepth"],
 )
+parameters = model.getParameters()
+parameters.Mask.rho = 100.
 
 # process setup
 process = vps.Process()

diff --git a/include/models/psModelParameters.hpp b/include/models/psModelParameters.hpp