Repositories list

• drm-ald-arts

  Public
  This is a MATLAB implementation of a diffusion-reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio structures.

  MATLAB

  •

  MIT License

  •1•1•0•0•Updated Apr 19, 2023Apr 19, 2023

• dream-ald

  Public
  DReaM-ALD is a MATLAB implementation of a diffusion–reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio microchannels.

  diffusion-reaction-modelatomic-layer-depositionconformality+ 2saturation-profilethickness-profile

  MATLAB

  •

  MIT License

  •2•6•0•0•Updated Apr 11, 2023Apr 11, 2023