DReaM-ALD is a MATLAB implementation of a diffusion–reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio microchannels.
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Updated
Apr 11, 2023 - MATLAB
DReaM-ALD is a MATLAB implementation of a diffusion–reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio microchannels.
A repository outlining the use of LLMs to extract structured process parameters from research articles on ALD-deposited films, and uploading this data to the ORKG as an AI-ready database.
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